Silicon Valley Branch Office

2043 Zanker Road
San Jose, CA 95131
Telephone: 408-501-1400
Fax: 408-501-1499


Semics Products

 

 

SEMICS_logo

6″, 8″ & 12″ Wafer Prober

Model: OPUS3

OPUS_3 Features:1) Smart Probe card Alignment (SPA) Mechanism2) Intelligent Overdrive Control3) 6″, 8″ & 12″ Wafers without Mechanical Changeover4) Superior Tri-Temp. Control (Cold / Ambient / Hot)5) Flat Top for Large Test Head6) Easy On-Site Calibration7) Fast Index / Less Vibration

8) Fastest & Simplest Auto Card Changer

9) Fast Linear Motor Control for XY Stage

10) Z-Down Control at the Time of Power-Down

11) 200×100 Needle Cleaner

12) CCD Camera Cassette Mapping for Thin Wafers

13) High-Performance OCR

14) SECS GEM Compliance

 

New Option
SPA (Smart Probe and Alignment)

Monitoring the contact pressure of probe pins,

wafer chuck automatically align itself to probe card.

image

 

Basic Specifications

Model OPUS3
Wafer Size 6″, 8″ & 12″ Wafers
Accuracy ±1.5µm
Card Changer 350mm – 480mm
Temperature Range -55 – +200°C (with Ambient Control)
Chuck Force 300kg
Index Time 200 msec. (5mm x 5mm x 0.5mm)

 

 Auto Cassette Loader may be ordered in 3 different ways:

(1) Flat Top Loader

(2) Top Loader

(3) Dual Foup Loader

OPUS_3_w_Top_Loader OPUS3_DUAL_FOUP
OPUS3 with Top Loader OPUS3 Dual Foup Loader

 

 

 

 

OPUSII

6″, 8″ & 12″ Wafer Prober

Model: OPUSII

Features:

1) 6″, 8″ & 12″ Wafers without Mechanical Changeover

2) Flat Top for Large Test Head (compatible with SEMI Standards)

3) Fast Linear Motor Control for XY Stage

4) Z-Down Control at the Time of Power-Down

5) 200×100 Needle Cleaner

6) CCD Camera Cassette Mapping for Thin Wafers

7) One-Touch Card Changer

8) High-Performance OCR

9) SECS GEM Compliance

10) Short Index Time

 

 

Basic Specifications

Model OPUSII
Wafer Size / Thickness 6″, 8″ & 12″ Wafers / 180µm – 2000µm
Accuracy

Positioning Accuracy: ±1.5µm (X/Y), ±3µm (Z)

Contact Accuracy: ±3µm (X/Y), ±5µm (Z)

Card Holder Unit Flatness Max. 20µm, Ø300mm
Temperature Range Ambient – +150°C (Option: -40°C / -10°C)
Chuck Force 200kg
Index Time 200 msec. (5mm x 5mm x 0.5mm)
Dimensions 1460mm (W) x 1350mm (D) x 960mm (H)
Weight 1500kg

 

Available Versions
OPUSII-S OPUSII-M
OPUSII-S OPUSII-M